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Pad-Oxide |
120 Å of oxide is grown |
Nitride Deposit |
3000 Å of nitride is deposited |
N-Well Mask |
A mask is applied on the epitaxial layer using photolithography. |
Etch Nitride & Pad-Oxide |
0.35 µm of nitride and 0.012 µm of oxide is etched |
Selective Phosphorus Implant |
Phosphorus is implanted at : - dose = 1x1013 cm-2 - energy = 80 keV |
Drive-In Phosphorus Diffusion |
Phosphorus is diffused at : - dose = 2x1017 cm-2 - time = 35 min - temp. = 1100 °C |