Process steps
Description

Pad-Oxide

120 Å of oxide is grown

Nitride Deposit

3000 Å of nitride is deposited

N-Well Mask

A mask is applied on the epitaxial layer using photolithography.

Etch Nitride & Pad-Oxide

0.35 µm of nitride and 0.012 µm of oxide is etched

Selective Phosphorus Implant

Phosphorus is implanted at :
- dose = 1x1013 cm-2
- energy = 80 keV

Drive-In Phosphorus Diffusion

Phosphorus is diffused at :
- dose = 2x1017 cm-2
- time = 35 min
- temp. = 1100 °C