Liping Wang

Area of work

Simulation of Doping Profiles in Plannar MOSFET and FinFET

Dopant distributions have great effect on the performance of the devices. With device continuously scaling down, the precise control of dopant placement and concentration becomes even more critial. Ion Implantations are essential to IC manufacuring, and are used for almost all doping in silicon IC. For plannar MOSFET, besides the channel, extention and source/drain implantations, halo implantations at high tilt angles have been used to suppress the short channel effects. Simulation of doping profiles in MOSFET provides essential information for device simulation.      

Due to the non-planar architecture of FinFETs, sidewall doping of the fin is as important as the doping from the fin top, and conformal doping is usually desirable. While alternative techniques such as plasma immersion doping are being extensively investigated, ion implantation still plays a significant role for fin doping. A reported standard process flow for a 3D FinFET includes extension implantation with tilted beam and S/D implantation. Evaluation of the dopant distributions in the FinFET is an essential part of process simulation. We are working on developing a simulator for the doping profiles in the 3D structure and integrating it into the GSS device simulator for FinFET simulation.

Recent grants worked on

2011 -	EPSRC Platform Grant Atomic Scale Simulation of Nanoelectronic Devices (http://gow.epsrc.ac.uk/NGBOViewGrant.aspx?GrantRef=EP/E038344/1)
pre 2011	various industrial projects

About me

Dr Liping Wang is a Research Associate at the Device Modelling Group, School of Engineering, University of Glasgow. Previously I worked in a spin-out specialized CAD software company based in London (www.mebs.co.uk). From 2000 to 2002 I worked as a Research Associate in Cavendish Laboratory, Cambridge University. I received PhD degree in Electronic Science and Technology, and  BS degree in Physical Electronics, from Xi'an Jiaotong University, P. R. China. Among other prizes and awards, my PhD dissertation titled “Differential algebraic theory and calculation method for arbitrary-order aberration analysis for electron optical systems with application in deflection of CDTs” is one of the nominees of National Distinguished Doctoral Dissertations of China (2003).

Currently I'm working on the process simulation of electron devices, under the supervision of Prof. Asenov. I have broad interests in simulation of nanoelectronic structures and systems, novel numerical analysis techniques and applications, etc.

Contact:
School of Engineering, University of Glasgow, Rankine Building, Oakfield Avenue, Glasgow G12 8LT, Scotland UK

Email: Liping dot Wang at glasgow.ac.uk

Publications

2011

• Haoning Liu, Liping Wang, John Rouse, Eric Munro. Design and optimization of multipole lens and Wien filter systems. Nuclear Instruments and Methods in Physics Research A, July 2011, Vol. 645, Issue 1, pp.300-306.

2010

• Haoning Liu, Liping Wang, John Rouse and Eric Munro. Design and Optimization of Multipole Lens and Wien Filter Systems. CPO-8, 2010.
• Eric Munro, Haoning Liu, John Rouse and Liping Wang. Simulation of Aberration Correctors for Electron Microscopy, using Multipole Lenses, Wien Filters and Electron Mirrors. IMC-17, 2010.

2008

• Liping Wang, John Rouse, Eric Munro, Haoning Liu, Xieqing Zhu. Aberration analysis of electron mirrors by a differential algebraic method. Optik, 2008, Vo.  119, No. 2, pp. 90-96.
• Liping Wang, Eric Munro, John Rouse, Haoning Liu. Simulation of electron mirrors by the differential algebraic method. Physics Procedia, 2008, Vol. 1, No. 1, pp. 297-304.
• Eric Munro, John Rouse, Haoning Liu, and Liping Wang. Aberration correction for electron beam inspection, metrology, and lithography. J. Vac. Sci. Technol. B, November 2008, Vol. 26, Issue 6, pp. 2331-2336. (Papers from the 52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication)
• Haoning Liu, John Rouse, Liping Wang, Eric Munro. Software for designing multipole aberration correctors. Physics Procedia, 2008, Vol.1, No. 1, pp. 339-353.
• John A. Rouse, Eric Munro, Liping Wang, Haoning Liu. Simulation of curved axis systems. Physics Procedia, 2008, Vol. 1, No. 1, pp. 451-459.
• Eric Munro, John Rouse, Haoning Liu and Liping Wang. Design of Aberration Correctors Using the Differential Algebraic Method. Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, Proceedings of the 11th international seminar, Brno, Czech Republic, July 2008, pp.81-84.

2006

• Eric Munro, Liping Wang, John Rouse, and Haoning Liu. Differential Algebraic Method for Electron Optical Design. Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, Proceedings of the 10th international seminar, Brno, Czech Republic, May 2006.
• Eric Munro, Liping Wang, John Rouse and Haoning Liu. Theory and Application of the Differential Algebraic Method for Computing the Aberrations of Electron Optical Systems. The 16th International Microscopy Congress (IMC16), Sapporo, Japan, September 2006.
• E. Munro, J. Rouse, H. Liu, L.-P. Wang and X. Zhu. Simulation software for designing electron and ion beam equipment. Microelectronic Engineering, 2006, Vol. 83, No. 4-9, pp.994-1002. (31th International Conference on Micro- and Nano- Engineering (MNE05), Viena, Austria, Sep. 2005. )

2005

• J. Rouse, H. Liu, L.-P. Wang and E. Munro. Software tools for electron mirrors and multipole correctors. The 61st Annual Meeting of  the Japanese Society of Microscopy. Tsukuba-city, Japan, June 2005.
• L.-P. Wang, H. Liu, J. Rouse, E. Munro and X. Zhu. Simulation of multipole systems by differential algebraic method. Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, Proceedings of the 9th international seminar, Brno, Czech Republic, Jul. 2004, pp.79-80.

2004

• L.-P. Wang, J. Rouse, H. Liu, E. Munro and X. Zhu. Simulation of electron optical systems by differential algebraic method combined with Hermite fitting for practical lens fields. Microelectronic Engineering 2004, Vol.73-74, pp. 90-96. (29th International Conference on Micro- and Nano- Engineering (MNE03), Cambridge, UK, Sep. 2003.)

2002

• L.-P. Wang, T.-T. Tang, B.-J. Cheng, etc. Differential Algebraic Method for Arbitrary-order Aberration Analysis of Combined Electron Beam Focusing-Deflection Systems. Optik, 2002, Vol.113, No.4, pp.181-187.
• L.-P. Wang, T.-T. Tang, B.-J. Cheng, etc.  Application of Differential Algebraic Method to the Aberration Analysis of Curvilinear-Axis Optical Systems. Optik, 2002, Vol.113, No.4, pp.171-176.
• B.-J. Cheng, Z.-B. Shao, L.-P. Wang, et al., “Device model parameter extraction based on automatic differentiation technique,” Research & Progress of Solid State Electronics (China), 2002, vol.22, No.1, pp. 8-13.

2000

• L.-P. Wang, T.-T. Tang, B.-J. Cheng. Differential Algebraic Method for Arbitrary High Order Aberration Analysis of Electron Deflection System, Optik, 2000, Vol.111, No.7, pp.290-296.
• L.-P. Wang, T.-T. Tang, B.-J. Cheng. Differential Algebraic Theory and Method for Arbitrary High Order Aberrations of Electron Optics, Optik, 2000, Vol.111, No.7, pp.285-289.
• L.-P. Wang, T.-T. Tang, B.-J. Cheng, J. Cai. Object Oriented Implementation of Differential Algebraic Method up to Arbitrary High Order, Journal of Xi’an Jiaotong University, 2000, Vol.34, No.6, pp.55-59.
• B.-J. Cheng, Z.-B. Shao, L.-P. Wang, T.-T. Tang. Automatic Differentiation Technique in Device Model Parameter Extraction, International Conference on Modeling and Simulation of Microsystems (MSM 2000), San Diego, California, USA, March, 2000.

1999

• L.-P. Wang, T.-T. Tang, J. Cai. Study on the Object Oriented Implementation of Automatic Differentiation Technique , Optik , 1999, vol. 110, No.10, pp. 449-454.
• L.-P. Wang, T.-T. Tang, B.-J. Cheng, J. Cai. Automatic Differentiation Method for the Aberration Analysis of Electron Optical Systems, Optik, 1999, vol. 110, No.9, pp. 408-414.
• L.-P. Wang, T.-T Tang. Surface Magnetic Charge Method Combined with Spatial Harmonic Expansion for Magnetic Field Analysis of Deflection Yokes, IEEE Tran. on Mag., 1999, No.5, pp. 4166-4170.
• L.-P. Wang, K.Y. Hu, T.-T. Tang. Harmonic Surface Charge Method for Calculation of 3D Magnetic Fields of Deflection Yoke, Vacuum Science and Technology (China), 1999, Vol.19, No. 6, pp. 433-438.
• L.-P. Wang, K.-Y. Hu, B.-J. Cheng. Applicability Analysis of Perturbation Method for Tolerance Calculation of Electrostatic Lenses, Journal of Xi’an Jiaotong University, 1999, vol. 33, No.5, pp.5-9.
• L.-P. Wang, T.-T. Tang. Space Harmonic Expansion for Analyzing 3D Magnetic Fields of Deflection Yoke, Journal of Xi’an Jiaotong University, 1999 , Vol. 33, No. 11, pp.23-26
• L.-P. Wang, T.-T. Tang. An Automatic Differentiation Technique: Differential Algebra and its Application in Charged Particle Optics, Chinese Journal of Computational Physics, 1999, Vol. 16, No. 3, pp. 225-234
• L.-P. Wang, T.-T. Tang, B.-J. Cheng, J. Cai. Automatic Differentiation Method for Aberration Analysis of Electron Optic System, Journal of Xi’an Jiaotong University, 1999, vol.33, No.12, pp.101-105.
• L.-P. Wang, T.-T. Tang, B.-J. Cheng, J. Cai. Automatic Differentiation Method for Aberration Analysis of Deflection Systems of Charged Particle Beam, Nuclear Science and Engineering (China), 1999, vol.19, No.4, pp.367-373.
• B.-J. Cheng, L.-P. Wang, Z.-B. Shao, T.-T. Tang. Automatic Differentiation Technique and Its Application in Data Fitting, Journal of Xi’an Jiaotong University, 1999,.Vol. 33, No.7, pp.19-22.
• H.-Y. Hu, L.-P. Wang, T.-T. Tang. High-order Space Harmonic Functions of Saddle and Toroidal Deflection Yokes, Vacuum Science and Technology (China), 1999, Vol. 19, No.3, pp.185-195.

1998

• L.-P. Wang, T.-T. Tang. Calculation of Defect Fields of Electrostatic Lens Based on Perturbation Theory, Vacuum Science and Technology (China), 1998, Vol. 18, No.6, pp. 436-440
• L.-P. Wang, B.-J. Cheng, T.-T. Tang, J. Cai. Automatic Differentiation Technique for Aberration Analysis of Electronic Optic Systems with Implementation in Visual C++ Environment, Journal of Chinese Electron Microscopy Society, Vol. 18, No.6, pp. 644-651.
• B.-J. Cheng, L.-P. Wang, T.-T. Tang. Optimization of Focusing Lens in the Experimental System of Boersch Effect, Vacuum Electronics (China), 1998, No.5, pp.7-11.
• B.-J. Cheng, X.-D. Liu, T.-T. Tang, L.-P. Wang. Experimental Studies of the Boersch Effect of Electron Beams, Vacuum Science and Technology (China), 1998, Vol.18, No.5, pp.364-368 .